ES series ultra-fine dispensing machines are high-precision models equipped with an X-Y stage whose repetitive positioning precision is ±2μm or less and best-suited to ultrafine dispensing such as patterning on a wafer.

These models are equipped with a Twin-air dispenser (Full function type) as a standard device, and its top view camera and side view camera allow you to easily perform various operations such as setting of conditions, monitoring and inspection, so that these models make fine patterning possible.

Three product lineups (ES10, ES12 and ES30) are provided according to a work size. The ES30 supports an 8-inch wafer, and it can be connected to an automatic wafer transport unit. The optional specification is available also so that it can be used in the semiconductor industry such as optional models designed for a clean room, FFU or a suction stage supporting wafers.